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Model source: Bram van der Sanden, Michel Reniers, Marc Geilen, Twan Basten, Johan Jacobs, Jeroen Voeten, and Ramon
Schiffelers, "Modular Model-Based Supervisory Controller Design for Wafer Logistics in Lithography Machines", 2015
ACM/IEEE 18th International Conference on Model Driven Engineering Languages and Systems (MODELS), pages 416-425, 2015,
doi: https://doi.org/10.1109/MODELS.2015.7338273.
